"LN2-Free: Achieves 24-Hour Stable Emission Analysis" Emission Analysis Camera to Improve Operational Rate and Efficiency of Advanced Semiconductor Failure Analysis

Solid Cold Emmi-X Camera

Hamamatsu Photonics K.K. will launch the "Solid Cold Emmi-X Camera," an emission analysis camera for semiconductor failure analysis equipment. This product adopts Solid Cold cooling (linear cooling method) and, when mounted on our company's inverted emission microscope, achieves higher stability and superior maintainability compared to LN2 (liquid nitrogen) cooling systems. Furthermore, combined with a wide field of view and high S/N sensor, as well as a high-speed wavelength switching mechanism, it can detect weak light emission with high sensitivity. It enables high operational rates and efficient failure analysis in the analysis of advanced logic devices and high-density memory devices.

Orders for this product will begin on July 7 (Tue) targeting semiconductor manufacturers and semiconductor manufacturing equipment manufacturers both domestically and internationally. This product will be introduced at IPFA2026, held in Singapore from July 13 (Mon) to July 16 (Thu). Visitors are encouraged to inquire with our booth representatives.

*Solid Cold is a registered trademark of Hamamatsu Photonics K.K.

Product information here

<Features>

Cooling mechanism for high stability and superior maintainability

- Highly reliable design with an MTTF (Mean Time To Failure) of 90,000 hours

- Non-contact and 24-hour continuous operation with Solid Cold cooling

Structural image of Solid Cold cooling

Weak light emission detection with wide field of view and high S/N

- Wide field of view observation with a 1k x 1k sensor

- Noise reduction using patent-pending technology

High-speed wavelength switching and high-precision position control

- Wavelength switching possible in just 5 seconds

- High positional accuracy achieved with a single-axis filter and gearless structure

<Measurement Example>

Weak light captured with the Solid Cold Emmi-X Camera

[Measurement Conditions]

Process: 7 nm logic

Circuit: Ring oscillator

Lens: 20x, NA=0.6

Exposure time: 60 seconds

Power supply voltage (Vdd): 400 mV

<Our Products That Can Be Equipped>

Dual PHEMOS®-X Emission Microscope iPHEMOS-MPX Inverted Emission Microscope

*PHEMOS is a registered trademark of Hamamatsu Photonics K.K.

Emission microscope lineup here

<Sales Information>

- Sales start: July 7, 2026 (Tue)

- Price (excluding tax): 130 million yen per set

- Sales target units: 10 units in the first year, 12 units in the third year, 15 units in the fifth year

Solid Cold Emmi-X Camera

Hamamatsu Photonics K.K.

For Media Inquiries Hamamatsu Photonics K.K. Corporate Communications Department 325-6 Sunayamacho, Chuo-ku, Hamamatsu City, 430-8587 Japan Life Hamamatsu Station Front Building TEL: 053-452-2141 FAX: 053-456-7888 E-mail: [email protected]

For General Inquiries Hamamatsu Photonics K.K. Sales Promotion Division Imaging & Measurement Instruments Sales Promotion Department 812 Toko-cho, Chuo-ku, Hamamatsu City, 431-3196 TEL: 053-435-1560 FAX: 053-435-7570 E-mail: [email protected]