Ziteng Semiconductor, under Qisda Group, Unveils Three Key Solutions at SEMICON Taiwan 2026 to Advance into Advanced Processes and Silicon Photonics Applications

Qisda (2352-TW) announced that Ziteng Technology, a subsidiary under group member Loshing (8374-TW), will showcase three key solutions—Fractilia CD-SEM metrology, ProSys megasonic wafer cleaning, and SEMI-TS in-fab logistics—at SEMICON Taiwan 2026, advancing into the semiconductor advanced process and silicon photonics markets.

Ziteng Technology's General Manager, Guo-Rong Chen, stated, "With the rapid development of advanced semiconductor and silicon photonics processes, the reliability of metrology equipment, wafer cleanliness, and in-factory logistics efficiency have become critical factors affecting yield and production stability. By integrating these three solutions, Ziteng helps customers extend optimization from single-point equipment to cross-process management, reducing production risks and enhancing overall efficiency."

Among them, Fractilia CD-SEM metrology enhances cross-tool measurement reliability. FAME EDGE continuously monitors equipment status to assist in identifying measurement anomalies. This metrology capability can also be extended to silicon photonics processes. Currently, Fractilia-related solutions have been adopted by over 30 semiconductor and silicon photonics enterprises globally.

BevelSonic utilizes focused acoustic energy, while ProSys megasonic wafer cleaning removes particles and contaminants from wafer edges and backsides in a non-contact manner, reducing the risk of cross-contamination and edge damage. The single-wafer megasonic cleaning system, MegPie, achieved a 98% particle removal efficiency in post-chemical mechanical polishing (CMP) cleaning tests.

SEMI-TS in-fab logistics employs a hybrid automated material handling system (Hybrid AMHS) combining overhead hoist transfer (OHT) systems with clean conveyor systems, already deployed in China and South Korea. Based on data from operational systems, queue delays can be reduced by nearly 50%. The nitrogen purge module (N2 Purge Unit) features a plug-and-play design, minimizing reconfiguration and equipment downtime risks.